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​​半導体検査測定機器 | 高周波ﾌﾟﾛｰﾌﾞ | 当社の製品は、半導体や液晶関連など、特に高い精度が要求される分野で広く活用されています / エヌピイエス株式会社 NPS,Inc. 新精密技術を追求する！ ﾏｲｸﾛ波用ﾋﾟｺﾌﾟﾛｰﾌﾞ 高周波プローブ ４探針プローブ ﾏｲｸﾛ波用ﾋﾟｺﾌﾟﾛｰﾌﾞ 1/6 　半導体や電子工業分野で求められる検査測定機器や製造装置の輸出入、製造・販売を行っています。 　「新技術」から生まれる「精密さ」にこだわり、その追求を通じてお客様に最高の価値を提供いたします。 　当社の製品は、半導体や液晶関連など、特に高い精度が要求される分野で広く活用されています。 4-Point Probe N ews お知らせ 25/12/09　年末年始休業のお知らせ 25/11/20　SEMICON Japan 2025 出展のご案内 25/10/22　MWE 2025(マイクロウェーブ展)出展のご案内 25/08/04　夏季休業のお知らせ 25/07/17　「Metoree」当社掲載内容について 25/06/23　 「トランジスタ技術」「インターフェース」掲載内容について 　　 25/04/01　セール品の販売について P roducts 製品 抵抗率測定器 ４探針法を用いて金属薄膜等のシート抵抗、または抵抗率を簡単で高精度に測定できるマニュアルタイプの計測器です。 ４探針プローブ ４探針プローブの取扱い開始から半世紀、抵抗率を測定するための高精度な半導体プローブとして、世界的に認められております。 IC用ピコプローブ 測定デバイスに与える負荷を最小限にして計測が行なえるため、デジタル波形を忠実に再現することができます。 マイクロ波用ピコプローブ 米国GGB社独自の連続式同軸構造による低損失と高耐久性を兼ね備えたマイクロ波デバイス用テストプローブです。 ➤ 製品一覧はこちら マイクロ波テスト台 マイクロ波を伝送路とする小型回路基板や部品などを固定装着して、特性評価を行うためのテスト用冶具です。 精密位置決めステージ 微動位置決め・検査用テーブルとして使用できる精密ステージです。モデルにより、XYZ、電導、手動など豊富な種類を用意しております。 SEMICON JAPAN 1977-2025 　当社は、半導体製造･検査装置の総合展示会 SEMICON JAPAN（セミコンジャパン）に第１回より出展しています。 Learn More ➤SEMICON JAPAN

主な取扱製品 1. 半導体、薄膜層などの抵抗率測定器用4探針プローブ及び関連機器 2. 半導体、液晶薄膜シート抵抗率測定器 3. 半導体IC(ULSI、VLSIなど)の特性評価用高性能プローブ 4. マイクロ波計測用プローブ及び測定用装置 5. 計測用、実験用、手動及び電動の直線、回転形各種スライド製品 6. プローブニードル、スクライプポイント 7. レーザー干渉計システム 製品ラインナップ アンカー：半導体電子材料関連 半導体・電子材料関連 半導体・液晶 前工程（検査） アンカー：前工程 抵抗率測定器 4探針プローブ P/N判定器 レーザー干渉計測器 ※前・後工程両方で使用 半導体・液晶 後工程（検査） アンカー：後工程 IC用ピコプローブ 50Ω同軸プローブ マイクロポジショナー ICコンタクトプローブ プローブニードル アンカー：マイクロ波計測・関連部材 マイクロ波計測 マイクロ波用ピコプローブ マイクロ波テスト台 その他関連部材 キャピラリー素材 ダイヤモンドスクライプ アンカー：位置決め精密機械 位置決め精密機械 精密XYスライダーテーブル 精密治具SSマグネット

4-point probe is a high accuracy probe for measurement of resistivity. DC Four Point Probe systems is one of the most reliable methods for resistivity or sheet resistance measuring of conductive materials. It is a well known fact among engineers that the quality of the probing apparatus greatly affe Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　4-Point Probe 4-Point Probe [NPS Version] Pre-Process of Semiconductors and Liquid Crystal (Inspection) NPS 4-point probes are manufactured and assembled in Japan to ensure stable supply and measurement accuracy. A 4-point probe is like the sensor part of a machine. Needless to say, the performance of this sensor part affects the measurement results. The reliability of our 4-point probes has been recognized by many users. We have our own measuring instruments available, but other manufacturers' resistance measuring instruments can also be used. (In this case, a banana plug or similar device must be attached as a connector. The newly developed needle has a one-piece structure made of highly durable metal, and uses a low-resistance metal for the connection part to maintain good electrical conductivity, We ensure the accurate measurement of variety samples by conducting NPS's unique "Micro-edge contact" treatment. (IP=Ion implantation wafer, MT=Metal wafer, SB=Substrate silicon wafer, EP=Epitaxial wafer etc. for types of wafers ) We possesses a lot of experiences and solid accomplishments in this field. high accuracy, hight durability, world standard instrument, quick repair, unique design, etc. 【Related products】Sheet Resistance Measuring Instruments ■ 4-point probe 4-POINT PROBE with no fatal flaws！ More than half a century has passed since the first 4-point probe head was introduced to the world, and today it has become a universal standard in semiconductor inspection. With over 50 years of sales experience in Japan, NPS four probe heads have evolved to become higher-performance probes than the commonly sold four probe heads. We offer highly reproducible four probe heads that are compatible with NAPSON, MPP, JANDEL, KLA, and other point probes and overcome technical shortcomings. If you are not satisfied with your current four point probe head , please try our four point probe heads. The new 4-point probes have the following features. Major improvements and features: Accuracy improvement Durability improvement Cost reduction improvement of fatal defects of conventional products) Made in Japan and Japan Quality. Technical information ■ 4-Point Probe Please ask us about the 4-point probe ! Because we have 50 years of handling experience. Each part constituting the 4-point probe is made from the development and production of dedicated processing machines. By doing quality control from manufacturing to shipping by full-time technical staff, it is possible to provide high-precision, high-durability 4-point probes. In addition, in order to respond to requests from domestic users and with years of our experience, we set up our own specifications and assemble them. The NP type which NPS supplies is 4-point probe of the world highest quality. We also offer repair or modification of various 4-point probes. Please feel free to contact us for more information. Repair, Reconditioning, and Adjustment of Four-Point Probes Used 4-point probes can be repaired and adjusted for reuse. In addition, running costs can be reduced by replacing only consumables such as needles and guides. Repairable Probe Type Napson　 KLA Tencor MPP FELL About Repair ■Square probe 4-point probe head The name is derived from the square shape of the electrodes, which are equally spaced. Standard sheet resistance measurement of electronic materials is performed using the four probe method with electrode tips in series, but here we provide information on sheet resistance measurement using square probes with electrode tips arranged in a square shape. ■ Hand-Probe It is a handy type 4-point probe which can be easily measured on hand. It can be used for ingots etc. ■ 0.1mm Pitch MODEL SEP-4 is a 4-point probe for measuring sheet resistance with a needle spacing of 0.1 mm pitch. Since the distance between the four needles is as small as 0.3 mm (linear), the influence range of electric field energy is small, and even in the case of a pad with a small area of 5 × 5 mm, sheet resistance measurement is not affected by electric field power from the edge to around 0.5 mm. Can be mounted and fixed to our micro positioner 800MRF. Tip material Tungsten (W), Beryllium copper (BeCu) Tip shape Flat (F), Round (R) Needle spacing 0.1 mm (total distance 0.3 mm) or 0.3 mm (0.6 mm) Lead wire 90cm Banana plug, etc. can be attached as an option. ■ Reference Sample We also provide standard samples to check if the 4-point probes currently in use are functioning properly. When measuring by the DC four point probe method, regular probe maintenance and calibration are essential. A standard sample can help with this. This sample is not a traceable standard, it is a reference sample. Accessories include a protective case and a certificate of measurement of sample. Specification Chromium Thin Film　 Film thickness 1000Å Square about 1inch(25mmx25mm) Surface resistivity is 23Ω/□ Data from 5 repeatability measurements of the center of a r eference sample.(Measured with a standard 1mm pitch 4 probe) Reference samples are measured under the same conditions when shipped. 4-Point Probe Various specifications Wiring Diagrams Various compatible models (our specifications)

Home Products About Us SEMICON Japan 日本語サイト Four point probe Are you having problems with your 4- point probe? NPS can solve that problem for you! In this article, we will focus on the four-point probe. A standard instrument in use for over 40 years. The four-point probe was developed by A&M FELL of the UK in the 1960s as an electrode for measuring the resistivity of semiconductor materials. Later, the company was acquired by Kulick & Soffer, a major U.S. manufacturer of semiconductor equipment, which took notice of its performance and began selling it, and it became a tool widely used worldwide. In Japan, NPS (formerly known as Nakamura Precision Shokai) started selling the product in 1971, and introduced it to semiconductor manufacturers and equipment manufacturers. At that time, it was still difficult to find a simple and stable way to measure the resistivity of silicon wafers, and engineers quickly recognized the FELL probe as an important tool to solve the problem of semiconductor resistivity measurement, along with the development of measuring instruments. After repeated prototyping until the completion of the FELL probe, we established a design concept that predicted the next several decades and a theoretical structure that enabled high-precision measurement, and succeeded in creating a four-pronged probe that could be used with today's diversified objects to be measured. Later, the patented FELL probe became a worldwide standard instrument used by semiconductor and device manufacturers. (There was an episode where the engineers who were involved in the development of the probe created a separate company to market the probe because it was so good even at the prototype level, but in the end, the difference in performance and durability was so great that it could not be used as an industrial tool. Unlike a four-terminal probe, which simply has four needles, a four-prong probe is a high-performance probe created by "the science and technology of semiconductor contact. For example, the internal spring that pressurizes the needle (patented part) was determined from dozens of prototypes, and is a specification that has a basis in performance. For the mechanical part, we adopted the classic ruby guide for needle movement technique, which was the only cutting-edge watchmaking technology at that time 50 years ago, to pursue the accuracy of the hand guide. (Ruby sliding is still used in some of our FELL type probes, but for the sake of accuracy control and functionality, we use parts made with new materials and manufacturing technology for new probes.) For the needle part in particular, which comes into contact with the object to be measured, the tip structure is formed to correspond to the type of object to be measured, taking into consideration the physical and electrical elements. These technical considerations greatly affect the measurement accuracy, durability, measurement capability, and so on. In the 1970s, NPS President Hayato Nakamura spent a long period of time training at A&M FELL's factory in England to learn the manufacturing technology and know-how of four-point probes, and the technology he inherited directly from the engineers at that time is utilized in the current four-point probes. Nakamura@NPS

As a distributor in Japan of EXCEL PRECISION (USA EXCEL PRECISION CO., LTD), we deal with laser interferometer equipment. Combining a dual frequency He - Ne laser system employing stabilized Zeeman and an optical heterodyne detection / signal processor, it is possible to do highly accurate and reliable measurement of a Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　Laser Interferometry Tools Laser Interferometry Tools Pre-Process Post-Process Machine Tools As a distributor in Japan of EXCEL PRECISION (USA EXCEL PRECISION CO., LTD), we deal with laser interferometer equipment. Combining a dual frequency He - Ne laser system employing stabilized Zeeman and an optical heterodyne detection / signal processor, it is possible to do highly accurate and reliable measurement of a minimum reading resolution of 0.3 nano, and further a low cost system construction. Excel Precision Co., Ltd. has designed and manufactured originally, and established itself as a specialist of laser interference measuring instruments. More than 5000 units have been used worldwide. We manufacture not only standard products but also custom-made systems according to customer's request. Third choice. Excel Precision Laser Interferometer If you have a laser interferometer from Excel Precision, you can check accuracy at the nano level. ■ 1100B 6 element calibration system The 1100 B laser calibration system is mainly used for quality control on machine tools. It enables to detect and dizitize the table rattiling up to 5 elements at one time. ■ 1550 A angle sensor It enables you to measure displacements of the surface and the Z drive part regardless of color and reflectance by using 1550 A angle sensor.

Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　Resistivity Processor Sheet Resistivity Measuring Instruments Pre-Process of Semiconductors and Liquid Crystal (Inspection) High quality tool for professionals ! Using the 4-point probe method, this device ensures precise measurement of the sheet resistance of metallic thin film as well as semiconductor materials like a solar battery silicon with easy & simple operation. For the following product inspections 1) Processes from silicon to wafer manufacturing 2) Liquid crystal panels (LCD) manufacturing 3) Manufacturing process of wide range of electric conductivity elements. Optional 4-Point Probe is needed for the measurement. 【Related Product】4-Point Probe ■ Model sigma-5+ It ensures a precise measurement of the resistivity of silicon wafers and other relative materials. We also offer you handy type probes of sillicon for solar panels. Sigma-5+ is a high-end resistivity measuring instrument and the reason of the high performance is based on our 20 years+ experience of resistivity measuring. You will be able to get and evaluate the accurate sheet resistivity and resistivity rate in product line. Also, you can use it for the R&D and inspection process of semiconductor subtrate and conductive thin film subtrate. * Sigma-5+ and sample stage in the photo. [Specification] [Features] - Detailed test available through intelligent control panel - Desktop size desing - With wide range of measurement - Automatic exchange of polarity of electricity - Automatic reset-zero adjustment - Automatic range selection - Sample thickness adjustment - Average value output and printout - Special function - correction of temperature (for silicon) - Temperature input correction factor - Interface for the data printer - Interface for data transfer (RS232C) - Stages available: RG-5, RG-12, RGE-12 sigma5+.pdf ■ Handy-type Sheet resistance & Resistivity meters SRM-232 Sheet Resistance Meters are low-cost hand-held sheet resistance testing systems that include a meter and a four-point probe for use in measuring the sheet resistance of applied coatings such as conductive paints, EMI coatings, ITO on glass, etc. We also available PV-628 for the resistivity of the Si wafers, such as solar cells foundation. Each device enables you to output data to computers, and power source has the auto power-off function. ■ Handy-type Resistivity meter Model PV-628 MODEL PV-628 is a handy-type measuring instrument using 4-point probe method and is designed only for silicon of solar power generation. You can use it without considering the shape and size of the object. It's a portable device which works with battery cells.

Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　Picoprobe for Microwave Picoprobe for Microwave Microwave Measurement Picoprobe (design and manufactured by GGB Industries,Inc. ) for microwave (RF probe) is a test probe for microwave devices combining low loss and high durability by GGB's unique continuous coaxial structure (patented). Also, with multi-contact probes that can be arranged with DC probes, it is now possible to reduce transmission measurements such as transmission by using a hybrid configuration of capacitors and resistors (patented). Picoprobe is widely adopted for engineers sticking to severe data measurement. With the leaf spring type ground chip structure and edge contact method, low contact resistance can be realized and good measurement reproducibility is obtained, and needle tip made of nickel material can be manufactured. Please contact us for pitch of 100 μm or less, large current probe for car electronics etc. It has low loss, high repeatability and high durability, and has its own performance by patented coaxial structure and patented bypass capacitor method etc. 【Related Products】Jig tool for Microwave Testing ・ Micro Positioner [Features] ■ Strong structure and high performance The signal part of the Picoprobe has a continuous coaxial structure from the connector part to the needle tip. This continuous coaxial structure is excellent in signal transmission characteristics and can reliably transmit a signal to the peak frequency region. In addition, the attached needle tip is hardly affected by the resonance caused by external vibration, and is also strong against overloading when attaching to the needle tip. ■ Various styles Several styles are available for the Picoprobe for measuring various sample shapes such as flat board and package. ■ Easy needle probe The tip of the grant attaching to the DUT of the Picoprobe has a spring-like structure. In contrast, a fixed gap is made between the fixed signal line needle tip and the ground needle portion. Because this gap can be used as a guideline for needle guarding, you can always contact in a stable state. ■ Point contact The tip of the Picoprobe has a point shape so that stable contact is always obtained. It ensures the reliable measurement because it repels the oxide film of the object and reduces misalignment error occurring when contacting the needle tip. Function comparison table of picoprobles for microwave

Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　Picoprobe for IC Post-Process of Semiconductors and Liquid Crystal (Inspection) Picoprobe for IC By using the Picoprobe (design and manufactured by GGB Industries,Inc. ) for IC, the internal voltage of the IC can be measured accurately.Picoprobe is for IC voltage measurement which keeps the stray capacitance value of the probe itself to the utmost limit and further bring the impedance close to the infinite value. This minimizes the load on the measuring device and enables measurement to be performed faithfully. Not only Models 35 which is the world's fastest FET probe, but also we prepare many other models corresponding to each measurement mode. Picoprobe is a worldwide standard instrument as a tool for analytical measurement in integrated circuit design field.We will also correspond with adapters etc. so that they can be used with probers of each manufacturer. 【Related Products】Jig tool for Microwave Testing ・ Micro Positioners [Function comparison table for Picoprobe (FET probe)]

適格請求書発行事業者登録番号について 　インボイス制度の適格請求書発行事業者登録をいたしました。 登録番号 T9010601024421 　「国税庁インボイス制度適格請求書発行事業者公表サイト 」からもご確認いただけます。

It is a precision slider (XY table) that can be used in a small place as a fine positioning / inspection table. We have various kinds available. There is no blurring and rattling, and it is made to have high rigidity. Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Positioning Precision Machinery 　>　X-Y Slider Tables X-Y Slider Tables Positioning Precision Machinery It is a precision slider (XY table) that can be used in a small place as a fine positioning / inspection table. We have various kinds available. There is no blurring and rattling, and it is made to have high rigidity. 　VELMEX, INC. Nonmagnetic XY table (photo is an example)

It is a needle for electrical characteristics inspection made with optimum alloy of noble metal type mainly composed of palladium, as the contact material for current application. It has the same mechanical characteristics as tungsten and has superior electrical characteristics to beryllium copper, so stable contact is Home Products About Us SEMICON Japan 日本語サイト Product list 　>　Semiconductors and Electronic Materials 　>　Probe Needle Probe Needle Post-Process of Semiconductors and Liquid Crystal (Inspection) It is a needle for electrical characteristics inspection made with optimum alloy of noble metal type mainly composed of palladium, as the contact material for current application. It has the same mechanical characteristics as tungsten and has superior electrical characteristics to beryllium copper, so stable contact is obtained. More than ten kinds of thickness are prepared between 0.2 mm and 0.7 mm. In addition, osmium alloy for LED, usually needle for tungsten and tungsten carbide material for semiconductor electrode. Especially the standard stock tungsten needle is very recommended at low price. 【Related products】Jig tool for Microwave Testing ・ Micro Positioner ■ P needle (palladium alloy needle) P needle is precision machined in Japan using Paliney 7 as a material. Paliney 7 is excellent in low wear resistance, low contact resistance and high durability. It has been used as an electrode material for more than 50 years, and it is used in many fields due to its material properties. Paliney 7 is an electrode material conforming to ASTM B 540. Containing metal (approx.): Palladium (35%) Silver (30%) Gold (10%) Platinum (10%) Copper (14%) others (1%) Individual resistivity: 30 μΩcm- Conductivity: 5.5 (% l ACS) Knoop hardness: 350-410 Melting temperature: 1015 ° C ■ T-4 needle (for submicron) T-4 needle was manufactured for general probing. Since the whisker needle for the pico probe is used, the submicron hole on the SiO2 opened by the laser cutter can also be attached without damage of the circuit. A shaft part of φ 0.5 mm can be bent by hand and it can be used by processing it into an arbitrary shape. We offer one set of 5 bottles at an affordable price. ■ Push-up pin We are manufacturing push-up pins for parts such as IC chips with tungsten carbide and piano wire at low price. Material: tungsten carbide, stainless steel, piano wire etc. We polish various materials uniformly and offer high quality pins. It can also be used for cutting small parts.

プローブって何？ 電子機器分野でプローブと称するものは、電気的測定で使用するための電極となる外部的なコンタクト部を指し一般的に針形状や棒形状のような機能的に通電接続が容易となる形状のものを指します。 プローブとは 　電子機器分野でプローブと称するものは、電気的測定で使用するための電極となる外部的なコンタクト部を指し一般的に針形状や棒形状のような機能的に通電接続が容易となる形状のもの を指します。 　プローブを用いた電気的測定システムをイメージした場合、測定器と比較してプローブは回路的に単純な構成部分となり、ただ単に被測定物と接続させるだけのツールとして捉えられ測定が実行されると想定してしまいます。 　しかしながら、実際に電気的測定を行う場合にはプローブそのものの性能となる物理的な要因や電気的な要因(導電率等が測定の重要なファクター)となる ため、これらを考慮しないと正確な測定は実行されません。 　内部電位が異なるプローブと被測定物との接続は複雑で、特に被測定物が空間電荷層の発生しやすい半導体になると、その要因が整流現象を左右し、測定結果に大きく影響する接続となってしまいます。仮に金属同士のであっても接触時の抵抗が影響して完全な接続（オーミックコンタクト）は実現しません。 そのため、電気的測定ではこれらの要因に対応すべくプローブの選定が必要となります。 　当社では素材の選定や製造技術により最良の接続を目的とする為のプローブをご提供しております。 　 半導体回路内の電気特性検査で使用されるプローブニードル では、金属電極用として接触の安定を図るため貴金属系素材であるパラジウム合金やオスミウム合金を使用し、接触抵抗の高い半導体用やアルミ電極用としてタングステン、タングステンカーバイトを使用して 製作しております。 　主にIC検査で使用されるピコプローブ については電気的な負荷要因の低減と専用の特殊な針先構造により高精度な低負荷測定を実現しております。 　シート抵抗測定用で用いられる4探針プローブ ではシリコン基板ウェーハ、イオン注入層、 エピタキシャル、アルミ等、それぞれのウェーハタイプに対応した専用プローブ（メカニカル）をご用意しています。 　 　これらのコンタクト部となる先端は精密加工技術により、被測定物とテスターとの安定した接続が可能となります。 中村＠NPS